BE726267A - - Google Patents
Info
- Publication number
- BE726267A BE726267A BE726267DA BE726267A BE 726267 A BE726267 A BE 726267A BE 726267D A BE726267D A BE 726267DA BE 726267 A BE726267 A BE 726267A
- Authority
- BE
- Belgium
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR135568 | 1968-01-11 | ||
| FR06009034 | 1968-02-21 | ||
| FR161082A FR94900E (fr) | 1968-01-11 | 1968-07-30 | Appareil de pulvérisation cathodique a grande capacité. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE726267A true BE726267A (en]) | 1969-05-29 |
Family
ID=27244767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE726267D BE726267A (en]) | 1968-01-11 | 1968-12-30 |
Country Status (4)
| Country | Link |
|---|---|
| BE (1) | BE726267A (en]) |
| DE (1) | DE1901211A1 (en]) |
| FR (1) | FR94900E (en]) |
| GB (1) | GB1257342A (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114720048B (zh) * | 2022-06-09 | 2022-09-02 | 季华实验室 | 一种电容薄膜真空计及neg薄膜制备方法 |
-
1968
- 1968-07-30 FR FR161082A patent/FR94900E/fr not_active Expired
- 1968-12-30 BE BE726267D patent/BE726267A/xx unknown
-
1969
- 1969-01-07 GB GB1257342D patent/GB1257342A/en not_active Expired
- 1969-01-10 DE DE19691901211 patent/DE1901211A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB1257342A (en]) | 1971-12-15 |
| FR94900E (fr) | 1970-01-16 |
| DE1901211A1 (de) | 1970-09-24 |